Home / Products / SMC HRZ-F – Semiconductor Chiller, 2-10 kW, ±0.1°C Stability

SMC HRZ-F – Semiconductor Chiller, 2-10 kW, ±0.1°C Stability

Product Name: SMC HRZ-F Semiconductor Chiller
Manufacturer: SMC Corporation
Type: Semiconductor Grade Thermo-Chiller
Cooling Capacity: 2 kW to 10 kW
Temperature Stability: ±0.1°C
Set Temperature Range: -20°C to 90°C
Energy Savings: Up to 65% (Inverter Compressor & Pump)
Drive: Inverter Compressor & Pump
Tank Design: All-In-One (Pump & Heat Exchanger Internal)
Heating Function: Yes (Integrated)
Circulating Fluid Recovery: Automatic Recovery Function
Maintenance: Minimized (Internal Pump & Heat Exchanger)
Applications: Semiconductor Manufacturing, Wafer Processing, Lithography, Etching, CVD, Precision Process Cooling & Heating

Product Enquiry