SMC XGTP – Parallel Seal Slit Valve for High Vacuum

The SMC XGTP is a parallel seal slit valve from SMC Corporation, purpose-engineered for high vacuum wafer transfer and process isolation applications in semiconductor manufacturing.

• Product Name: SMC XGTP Parallel Seal Slit Valve
• Manufacturer: SMC Corporation
• Type: Parallel Seal Slit Valve for High Vacuum
• Service Life: 3 Million Cycles
• Particle Generation: Reduced by 1/5 or More
• Bellows: Replaceable (Independent Servicing)
• End Lock: Mechanical End Lock
• Air Consumption Reduction: 22%